3. Overview
A nEXT730, nEXT930 or nEXT1230 pump consists of a turbomolecular pump with a
permanently attached motor controller containing drive electronics.
The motor controller controls the electrical supply to the pump. It allows manual
adjustment of the standby speed and all other controls can only be operated through
the logic interface. To operate the pump, connect it to the customer control equipment
and power supply or, alternatively, use the Edwards TIC Turbo Instrument Controller, TIC
Turbo Controller or TAG Controller and the Edwards power supply.
The motor controller drives the brush-less motor in the pump.
The nEXT pumps are supplied with an inlet screen fitted into the centering O-ring for ISO
version pumps and into the envelope for CF version pumps. The inlet screen protects the
pump against damage that would be caused by debris entering the pump.
The nEXT pumps have a vent port for venting the pump and vacuum system to
atmospheric pressure. The pump is supplied with a manual vent valve fitted; this can be
replaced with a TAV5 or TAV6 solenoid-operated vent valve. The TAV valve can be
directly controlled by the on-board motor controller.
The nEXT pumps have a purge port: an inert purge gas can be introduced to protect the
bearing and motor from corrosion. An optional vent port adapter and purge restrictor
can be fitted to the purge port to control the flow rate of the purge gas and to filter the
gas supply. Additionally this may be used to optimise the performance of the pump, for
example with low molecular mass gases.
A forced air cooling kit and a water-cooling block are available as optional accessories to
cool the nEXT pumps.
3.1 Ordering information
Table 1 Table Ordering information
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