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Edwards nEXT730D User Manual

Edwards nEXT730D
120 pages
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Turbomolecular pumps
nEXT730D, nEXT930D
, nEXT1230H
INSTRUCTION MANUAL
B8J200880_D
300812671_002_C3 Original ins
trucons
edw
ardsvacuum.com

Table of Contents

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Edwards nEXT730D Specifications

General IconGeneral
BrandEdwards
ModelnEXT730D
CategoryWater Pump
LanguageEnglish

Summary

Safety and Compliance

Definition of Warnings and Cautions

Defines warning, caution, and notice symbols and their meanings for safe operation.

Safety Symbols

Explains the meaning of various safety symbols used on the product and documentation.

Trained Personnel

Defines the qualifications required for personnel operating and maintaining the pump.

Important Safety Information

Mechanical Hazards

Details risks like ejection of parts, cutting, crushing, vacuum hazards, and falling parts.

Electrical Hazards

Covers risks of electrical shock from live parts and faulty earthing systems.

Thermal Hazards

Warns about burns from touching hot surfaces and advises handling when cool.

Danger Through Materials and Substances

Highlights hazards from pumped gases, toxic deposits, and prohibited substances.

Dangers in Connection with Safety-Related Measures and Precautions

Discusses dangers related to automatic start-up and the need for an emergency shut-down switch.

Overview

Ordering Information

Provides part numbers and corresponding pump names for ordering.

Motor Controller

Describes the motor controller's function, drive electronics, and connection to accessories.

Operational Features

Details features like power limit, standby speed, timer, analogue output, and braking.

Logic Interface

Explains the types of signals and interface options (USB, parallel, serial, CAN).

Technical Data

Operating and Storage Conditions

Specifies the environmental ranges for operation and storage.

General Technical Data

Lists technical specifications for nEXT730D, nEXT930D, and nEXT1230H pumps.

Pumping Speed Curves

Displays pumping speed curves for the nEXT730D pump.

Pumping Media

Details safe pumping media, hazardous substances, and prohibited gases.

Vent Gas Specification and Vent Control Data

Specifies vent gas requirements and control parameters.

Materials Exposed to Gases Pumped

Lists materials in the pump exposed to pumped gases.

Purge Gas Specification

Details the specification for purge gas.

Water Cooling

Details the requirements for water cooling supply.

Electrical Data

Provides electrical specifications for pump operation and power supply.

Logic Interface Connector

Describes the 15-way logic interface connector and its technical data.

Serial Protocol

Outlines the serial communication protocol settings and message format.

Command Set

Summarizes commands that can be sent to the pump for control and monitoring.

Multi-drop Operation

Explains how to communicate with multiple pumps using a single system.

Motor Controller Auxiliary Connector Socket

Details the 4-way auxiliary connector for accessories like vent valves and fans.

Indicator LEDs

Describes the function of the seven indicator LEDs on the pump controller.

Installation

Unpack and Inspect

Instructions for unpacking and inspecting the pump upon arrival.

Connect to the Vacuum System

Guides on connecting the pump to the vacuum system, including flange connections.

Remove and Replace the Inlet Screen

Procedures for removing and replacing the pump's inlet screen.

Mounting Orientation

Details the correct mounting orientations for the nEXT pumps.

Mount the Pump

Provides instructions on how to securely mount the pump to the vacuum system.

Backing Port Connection

Guides on connecting the backing port to a backing pump.

Purge Gas Connection

Details how to connect a purge gas supply for pump protection.

Electrical Installation

Covers making electrical connections to the pump.

Earth (Ground) Connections

Specifies requirements for proper earth grounding connections.

TIC or TAG Logic Interface Connections

Explains how to connect to Edwards TIC or TAG controllers.

Connect the Logic Interface to Control Equipment

Details connecting the logic interface to custom control systems.

Connect the Electrical Supply

Provides crucial safety warnings and instructions for connecting the electrical supply.

Connect the Parallel Control and Monitoring

Guides on making parallel control and monitoring connections.

Connection for Serial Control and Monitoring

Explains how to establish serial control and monitoring connections.

Connect the Serial Interface to the Customer Control Equipment

Details connecting the serial interface to external control equipment.

Serial Enable

Explains the function and activation of the serial enable signal.

Connection for Mixed Parallel and Serial Operation

Describes how to set up mixed parallel and serial control modes.

Cooling

Details the cooling requirements for the pump.

Cooling Requirements

Specifies the cooling needs to prevent pump damage.

Forced Air Cooling

Explains how to configure and install forced air cooling accessories.

Water Cooling

Details how to attach and connect water cooling systems.

Configuration

Configure the Pump Using Serial Commands

Guides on configuring the pump controller via serial commands.

Message Structure

Explains the required structure for serial command messages.

Command and Reply Table Definitions

Defines abbreviations and characters used in serial command/reply tables.

Power Limit Setting

Details how to set the pump's maximum power limit via serial command.

Powering a Fan from the Motor Controller

Explains how to power a fan using the motor controller's auxiliary output.

Controlled Venting Options

Describes how to configure automatic vent valve control options.

Standby Speed Setting

Guides on setting the pump's standby speed via serial command.

Normal Speed Setting

Details how to set the pump's normal operating speed via serial command.

Timer Setting and Options

Explains how to configure timer settings and options via serial command.

Analogue Signal Options

Describes how to configure analogue output settings via serial command.

Electronic Braking Options

Guides on enabling or disabling electronic braking via serial command.

Factory Settings

Details how to reset the pump to its original factory settings.

Assigning a Multi-drop Address

Explains how to assign a unique address for multi-drop operation.

Configure the Pump Using a TIC

Guides on configuring the pump using Edwards TIC controllers.

Operation

Before Starting the Pump

Covers pre-start checks and procedures before operating the pump.

Close the Vent Valve

Explains how to close the vent valve manually or via system control.

Pre-start Sequence

Outlines the steps for a pre-start sequence to ensure operational readiness.

Vent Options, Vent Valve Connection and Control

Details vent valve options, connections, and control procedures.

Manual Vent Valve

Describes the use of the supplied manual vent valve.

TAV5 or TAV6 Solenoid Vent Valve

Explains the connection and use of TAV solenoid vent valves.

Vent Valve Control

Details how to control the vent valve using the nEXT controller.

Alternative Valve Connected to the Vacuum System

Discusses using alternative vent valves with the vacuum system.

Operation with Parallel Control and Monitoring

Guides on operating the pump using parallel control and monitoring.

Start the Pump with Parallel Control

Details how to start the pump using parallel control inputs.

Run the Pump at Standby Speed with Parallel Control

Explains how to run the pump at standby speed using parallel control.

Stop the Pump with Parallel Monitoring

Guides on stopping the pump using parallel control signals.

Parallel Monitoring

Describes how to monitor parameters using parallel interface signals.

Operation with Serial Control and Monitoring

Guides on operating the pump using serial control and monitoring.

Delayed Start with Serial Control

Explains how to perform a delayed start using serial control.

Start the Pump with Serial Control

Details how to start the pump using serial commands.

Run the Pump at Standby Speed with Serial Control

Explains how to run the pump at standby speed using serial control.

Stop the Pump with Serial Control

Guides on stopping the pump using serial commands.

Monitor Temperature Readings with Serial Control

Details how to monitor temperature readings via serial control.

Monitor Link Parameter Readings with Serial Control

Explains how to monitor link voltage, current, and power via serial control.

Monitor Measured Motor Speed with Serial Control

Describes how to monitor motor speed via serial control.

Mixed Parallel and Serial Operation

Explains how to operate the pump using mixed parallel and serial modes.

Operation with a TIC or TAG

Guides on operating the pump with TIC or TAG controllers.

Decelerating and Venting

Provides instructions for decelerating the pump before venting.

Operation at Extreme Conditions

Discusses operation under high inlet pressure and high temperatures.

Operation with High Inlet Pressure

Details pump behavior and protection under high inlet pressure.

Operation at High Temperatures

Explains how the pump operates and is protected at high temperatures.

Protection Against Over-speed

Describes the pump's over-speed protection mechanisms.

Electrical Supply Failure

Discusses pump behavior and safety during electrical supply failures.

Bakeout

Explains the bakeout process to speed up degassing and achieve ultimate vacuum.

Shut Down the Pump Manually

Provides a procedure for manually shutting down the pump.

Maintenance

Bearing Maintenance

Details the process and recommendations for bearing replacement.

Rotor Life

Discusses the fatigue life of pump rotors and recommended service intervals.

Cleaning the Pump

Provides instructions and warnings for cleaning the pump's external surfaces.

Decoding Service Status Words

Explains how to decode service status words received via serial link.

Controller Run Time

Details how to monitor the controller's run time and recommended service interval.

Pump Run Time

Explains how to monitor the pump rotor's run time and recommended service interval.

Pump Cycles

Details how to monitor pump start-stop cycles and remaining service intervals.

Bearing Run Time

Explains how to monitor the bearing's run time and recommended service interval.

Storage

Disposal

Fault Finding

Command Set Error Codes

Lists error codes returned for serial control and monitoring commands.

Flashing Service Codes

Explains service flash codes indicated by the yellow status LED.

Flashing Error Codes

Details error flash codes indicated by the red alarm LED for fault diagnosis.

Flashing Inactivity Service Codes (Blue Bearing LED)

Describes flashing sequences of the blue bearing LED for inactivity service.

Decoding System Status Words

Explains how to interpret system status words from serial queries.

Service Information

Provides information useful for service personnel, like pump type and software versions.

Service

Return the Equipment or Components for Service

Guides on the procedure for returning equipment for service.

Bearing Monitoring and Conditioning System

Explains the bearing monitoring system and conditioning process.

Bearing On-site Maintenance

Details on-site maintenance procedures for pump bearings.

Bearing Run In Mode

Explains the Bearing Run In Mode (BRIM) process for bearing optimization.

Service Counter Reset

Guides on resetting the service counter after maintenance.

Spares

Inlet Screen

Lists available inlet screens and their item numbers.

Inlet Flange Seals and Integrated Inlet Screens

Lists inlet flange seals and integrated inlet screens with item numbers.

Accessories

Air Cooler

Describes the air cooler accessory and its connection.

Water Cooler

Describes the water cooler accessory and its suitability.

Flange Heater

Describes the flange heater accessory for degassing and protection.

TAV5 and TAV6 Vent Valves

Details the TAV5 and TAV6 solenoid vent valve options.

VRX Vent Restrictor

Describes the VRX vent restrictor for controlling vent gas flow.

Vent Port Adaptor

Details the vent port adaptor for NW10 fittings.

PRX Purge Restrictor

Describes the PRX10 purge restrictor for filtering and flow control.

Interface Cable

Describes the interface cable for PC connection and control.

nST2 PC Program

Details the nST2 PC software for pump control and monitoring.

Auxiliary Connector

Describes the auxiliary connector for accessories.

Auxiliary Extension Cable

Details the auxiliary extension cable for increased reach.

Auxiliary 'Y' Cable Adaptor

Describes the 'Y' cable adaptor for operating multiple accessories.

EPS 800 Power Supply

Details the EPS 800 power supply unit and its associated cables.

EU Declaration of Conformity

Declaration of Conformity

Additional Legislation and Compliance Information

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