nEXT
1230H
Purge gas ow
mbar · I · s
-1
sccm
0.4
24
Pur
ge gas connecon G 1/8"
V
enng connecon G 1/8"
* Depending on the ambien
t temperature, the gas throughput and the type of gas,
forc
ed air cooling or water cooling may be necessary.
4.2.1 Pumping speed curves
Figure 2 Pumping speed curves for nEXT730D
0
200
400
600
800
1.000
Pumping speed in l/s
Inlet pressure in mbar
Nitrogen
Helium
Hydrogen
Argon
nEXT730D
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
1
BC-0037-A
08/2021 - ©Edwards Limited
Page 25B8J200880_D
300812671_002_C3
B8J200880_D - Technical data