5.2.4 Backing port connecon
The pump is suit
able for use with Edwards Rotary Vane, Scroll or diaphragm backing
pumps. System performance may depend upon which pump is used. Contact Edwards
when selecng an appropriate backing pump for the applicaon.
WARNING:
Ensure sa
fe ducng of the backing line if oil mist or hazardous substances are
present.
CAUTION:
The pump must not be oper
ated or vented from a posive pressure gas supply when
the backing line is restricted or blocked.
NOTICE:
Do not use the pump with a backing pressur
e below 5 x 10
-4
mbar (5 x 10
-2
Pa).
Lower backing pressures will increase the evaporaon rate of the lubricaon reducing
the bearing life.
Use suitable vacuum tubing and connectors to connect the ange of the backing port t
o
the backing pump. If necessary, use exible pipe or bellows to reduce the transmission
of vibraon from the backing pump to the pump.
5.3 Purge gas connecon
5.3.1 Recommended purge gas ow
The recommended purge gas ow for typical applicaons is 25 sccm (0.42 mbar l s
-1
,
42 Pa l s
-1
).
The ow rate of the purge gas must be limited to the allowed range. To limit the ow
rate, use a ow controller or a pressure regulator and calibrated ow restrictor. The
PRX10 purge restrictor accessory (refer to Accessories) is suitable for this purpose.
5.3.2 Connect the purge gas
Connect a purge gas supply to protect the pump.
1. To supply a purge gas to the pump, remove the plug ed in the purg
e port.
2. To t a vent port adaptor (refer to Accessories).
3. Connect the purge gas supply to the vent port adaptor.
5.4 Electrical installaon
Always make the electrical connecons to the pump aer the pump has been installed
on the vacuum system.
Do not remove the motor controller from the pump. There are no user-serviceable
parts.
08/2021 - ©Edwards Limited
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allaon