8. Maintenance
WARNING:
When remo
ving the pump, ensure personal protecve equipment is used to
safeguard against damage from failed components and possible accumulaon of
hazardous material that may have been pumped. Check that the pump is vented to
atmosphere and at a safe temperature. Be wary of possible spillages, sharp edges
and debris. Removal of the pump inlet screen will always expose the risk of injury
from sharp edges.
WARNING:
Allow the pump r
otor to stop and then disconnect the motor controller before you
remove the pump from your vacuum system for maintenance or fault nding
procedures.
Table 23
Maintenance
Bearing maintenance on page 89 The bearing must be replaced when it reaches the end of its serv-
ice life. This is typically aer 35,000 hours.
Rotor life on page 90 The fague life of nEXT Turbomolecular pump rotors is typically
40,000 to 50,000 cycles. As a precauonary measure, Edwards rec-
ommends that pumps are returned for a major service (rotor re-
placement) aer 20,000 cycles of acceleraon to full speed and
back to a stop, or aer ten years of use, whichever occurs rst.
Cleaning the pump on page 90 If the inside of the pump is contaminated, it may not be possible to
achieve the specied ulmate vacuum performance, or pump-
down mes may increase.
Decoding service status words on
page 90
The service status may be accessed directly via the serial link. This
method of accessing service status will give the most complete pic-
ture of current and future service requirements and will allow pre-
ventave maintenance acvies to be scheduled.
Controller run me on page 92 The run hours and recommended service me of the controller on
the nEXT pump can be monitored.
Pump run me on page 92 The run hours and recommended service me of the rotor in the
nEXT pump can be monitored.
Pump cycles on page 92 The number of start-stop cycles completed and the number re-
maining unl the next service is due can be monitored.
Bearing run me on page 93 The run hours and recommended service me of the bearing in the
nEXT pump can be monitored.
8.1 Bearing maintenance
The bearing must be replaced when it reaches the end of its service life. This is typically
aer 35,000 hours.
When the bearing needs replacing, Edwards recommends:
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