Fault The pump does not respond in mul- drop mode
Cause The mul-drop is disabled.
R
emedy Make sure the pump has a mul-drop address and that commands are sent using
the mul‑drop protocol.
Fault The green Normal LED does not light or the pump is not rot
ang at full speed or
the pump fails whilst running
Cause The inlet pressure is too high.
Remedy Reduce the pumping load or check for a gross leak into the system.
Cause The pump is running too hot.
Remedy
▪ Increase the cooling to the pump. Change from air cooling to water cooling
(r
e
fer to for maximum inlet pressure and cooling requirements).
▪ Increase cooling water ow or decrease the water temperature or do both.
▪ Check that external heat sources (such as system bakeout heaters) are not
ex
cessive.
Cause The rotor does not rotate freely.
Remedy The pump bearings may be damaged. Contact the supplier or Edwards.
Fault Ulmate pressure cannot be reached
Cause Pr
essure is limited by water vapour.
Remedy Bake the system and pump.
Cause The vacuum gauges are contaminated.
Remedy Clean or replace the vacuum gauges.
Cause Pumping speed is insucien
t
due to poor conductance between the pump and
the gauge or
the chamber is too large.
Remedy Increase the conductance or reduce the volume.
Cause Inlet pressure is > 0.5 mbar (50 Pa).
Remedy If the interstage inlet pressure is too high, inlet pressure at the turbomolecular inlet
is increased; ensur
e that the interstage inlet pressure is < 0.5 mbar (50 Pa).
Cause
The backing pressure is > 10 mbar (1x10
3
P
a).
R
emedy The backing pressure may be too high. Check for backing pipeline leaks. If the
throughput is high, a larger backing pump may be required.
Cause The high vacuum area of the system is contaminated.
Remedy Clean the high vacuum system.
Cause Check the rest of the system for leaks and c
on
taminaon.
Remedy If found, repair the leaks and clean the contaminaon.
08/2021 - ©Edwards Limited
Page 97B8J200880_D
300812671_002_C3
B8J200880_D - Fault nding
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