Figure 15 Typical pumping system with a nEXT pump
1
10
9
87
16
5
13
15
11
14
4
6
3
12 2
CS/5055/A
1. Vacuum system 2. High vacuum gauge
3. Inlet screen 4. nEXT pump
5. Backing valve 6. Vacuum gauge
7. Flexible bellows
8. Foreline trap
*
9. Backing pump
*§
10. Mist lter
*
/ silenc
er
§
11. Vent valve 12. Alternave posion for vent valve
13. Radial air cooler 14. PRX purge restrictor
15. Regulated purge gas supply 16. WCX water cooler and connecons
1. Vacuum system 2. High vacuum gauge
3. Inlet screen 4. nEXT pump
5. Backing valve 6. Vacuum gauge
7. Flexible bellows
8. Foreline trap
*
9. Backing pump
*§
10. Mist lter
*
/ silencer
§
11. Vent valve 12. Alternave posion for vent valve
13. Radial air cooler 14. PRX purge restrictor
15. Regulated purge gas supply 16. WCX water cooler and connecons
*
for r
otary pump
§
for scroll pump
5.2 Connect to the vacuum system
CAUTION: CUTTING AND CRUSHING
When r
eaching in
to open anges there is a risk of cung and crushing your ngers.
Do not operate the vacuum pump with open anges. Do not reach into the pump.
When installing the vacuum pump, rst mechanically connect the inlets and outlets
and then make the electrical connecons.
CAUTION: VACUUM
Pulling int
o the vacuum can cause injury to hands or ngers.
Do not operate the vacuum pump with open anges.
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