Edwards nEXT nEXT85 - User Manual

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nEXT Turbomolecular pumps

nEXT85

INSTRUCTION MANUAL

B8G000880_D Original instrucons

edwardsvacuum.com

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Table of Contents7
Safety and Compliance13
Definition of Warnings and Cautions13
Safety Symbols13
Introduction15
Overview15
Motor Controller16
Operational Features17
Power Limit Setting17
Standby Speed17
Timer17
Analogue Output18
Automatic Vent Options18
Normal Speed Setting19
Electronic Braking19
Logic Interface19
USB Interface20
Parallel Control and Monitoring20
Serial Control and Monitoring20
Serial Control with Parallel Monitoring21
Parallel Control with Serial Monitoring or Serial Configuration21
Motor Controller Configuration (Serial Configuration)21
Technical Data23
General Technical Data23
Figure 1 Dimensions - Next85 ISO6323
Figure 2 Dimensions - Next85 CF6324
Figure 3 Dimensions - Next85 ISO10024
Figure 4 Dimensions - Next85 DN4024
Operating and Storage Conditions25
Vent Gas Specification and Vent Control Data25
Figure 5 Typical Base View25
Purge Gas Specification26
Figure 6: Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with Pump Initially at Full Rotational Speed)26
Cooling Water27
Electrical Data27
Figure 7 Maximum Relative Humidity to Avoid Condensation with Water Cooling27
Pumping Media28
Materials Exposed to Gases Pumped29
Logic Interface Connector30
Figure 8 Interface Circuits for Next Turbo Pump Controllers32
Motor Controller Auxiliary Connector Socket33
Indicator Leds34
Figure 9 Valve Connector34
Pump Performance Data35
Figure 10 Next85 Pumping Speed Versus Inlet Pressure Performance Graph36
Figure 11 Next85 Compression Ratio Versus Backing Pressure Graph36
Installation40
Unpack and Inspect40
Figure 12 Typical Pumping System with a Next Pump41
Connect to the Vacuum System42
Remove and Replace the Inlet Screen42
Mount the Pump43
Backing Port Connection45
Figure 13 Allowable Pump Orientation45
Interstage Connection46
Purge Gas Connection46
Recommended Purge Gas Flow46
Connect the Purge Gas46
Electrical Installation46
Ground the Connections47
Connect the Logic Interface to the TIC or TAG47
Connect the Logic Interface to the Control Equipment47
Connect the Parallel Control and Monitoring48
Connection for Serial Control and Monitoring50
Connect the Serial Interface to the Customer Control Equipment50
Figure 14 Logic Interface Connections - Parallel Control50
Figure 15 Motor Controller Status Information51
Figure 16 Logic Interface Connections - RS232 Serial Control51
Serial Enable52
Serial Protocol52
Figure 17 Logic Interface Connections - RS485 Serial Control52
Command Set53
Multi-Drop Operation57
Figure 18 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface58
Connection for Mixed Parallel and Serial Operation59
Figure 19 RS485 Multi-Drop Connection59
Cooling60
Cooling Requirements60
Figure 20 Logic Interface Connection - Mixed Parallel and Serial Operation60
Forced Air Cooling61
Water Cooling61
Configuration63
Configure the Pump Using Serial Commands63
Message Structure63
Command and Reply Table Definitions64
Power Limit Setting64
Power Supply to the Fan from the Motor Controller65
Controlled Venting Options65
Standby Speed Setting66
Normal Speed Setting67
Timer Setting and Options67
Analogue Signal Options68
Electronic Braking Options69
Factory Settings69
Assigning a Multi-Drop Address69
Configure the Pump Using a TIC70
Operation72
Before Starting the Pump72
Close the Vent Valve72
Pre-Start Sequence72
Vent Options, Vent Valve Connection and Control73
Manual Vent Valve73
TAV5 Solenoid Vent Valve73
Vent Valve Control74
Alternative Valve Connected to the Vacuum System76
Figure 21 Auxiliary Interface Connection76
Operation with Parallel Control and Monitoring77
Start the Pump77
Run the Pump at Standby Speed77
Stop the Pump77
Parallel Monitoring78
Operation with Serial Control and Monitoring78
Delayed Start78
Start the Pump78
Run the Pump at Standby Speed79
Stop the Pump79
Monitor Temperature Readings80
Monitor Link Parameter Readings80
Monitor Measured Motor Speed80
Mixed Parallel and Serial Operation81
Operation with a TIC or TAG82
Decelerating and Venting82
Figure 22 Serial and Parallel Control Flowchart82
Operation at Extreme Conditions83
Operation with High Inlet Pressure83
Operation at High Temperatures83
Protection against Over-Speed84
Electrical Supply Failure84
Bakeout85
Shut down the Pump Manually86
Maintenance87
Bearing and Oil Cartridge Maintenance87
Rotor Life87
Cleaning the Pump87
Decoding Service Status Words88
Controller Run Time89
Pump Run Time89
Pump Cycles89
Bearing Run Time90
Oil Cartridge Run Time90
Fault Finding91
The Pump Does Not Rotate after a Parallel Start Command Is Sent91
The Pump Does Not Rotate after a Serial Start Command Is Sent91
The Pump Does Not Respond in Multi- Drop Mode91
The Green Normal LED Does Not Light or the Pump Does Not Rotate at Full Speed or the Pump Fails While in Operation92
Ultimate Pressure Cannot be Reached92
The Pump Is very Noisy or There Is Excessive Vibration or both93
No Serial Comms93
Fail Signal or Standby Signal Not Working93
Yellow Service LED Is Flashing a Repeated Sequence94
The Red Alarm LED Is on94
The Red Alarm LED Is Flashing94
Other Problems94
Command Set Error Codes94
Flashing Service Codes95
Flashing Error Codes95
Decoding System Status Words96
Service Information98
Storage100
Disposal101
Service102
Return the Equipment or Components for Service102
Bearing and Oil Cartridge On-Site Maintenance103
Spares104
Inlet Screen104
Inlet Strainer104
Inlet Flange Seals and Integrated Inlet Screens104
NW16 and NW25 Ports105
Accessories106
Air Cooler106
Water Cooler106
Figure 23 Accessories106
Flange Heater107
TAV5 Vent Valve107
VRX Vent Restrictor107
Vent Port Adaptor108
PRX Purge Restrictor108
Interface Cable108
Nst PC Program108
Auxiliary Connector109
Auxiliary Extension Cable109
Auxiliary 'Y' Cable Adaptor110
Base Mounting Adaptor110

Brand	Edwards
Model	nEXT nEXT85
Category	Water Pump
Language	English

Edwards nEXT nEXT85 - User Manual

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