Edwards nEXT nEXT85 - Figure 12 Typical Pumping System with a Next Pump

Quanty Descripon
Check (ü)
1 Integral mesh centring ring O-ring seal (ISO variants only.
Screen will be installed to CF pumps.)
❏
Figure 12 Typical pumping system with a nEXT pump
1. Vacuum system 2. High vacuum gauge
3. Vibraon damper 4. Inlet screen
5. nEXT pump 6. Backing valve
7. Vacuum gauge 8. Flexible bellows
9. Foreline trap
*
10. Backing pump
*§
11. Mist lter
*
/ silencer
§
12. Vent valve
13. Alternave posion for vent valve
14. Radial air cooler 15. PRX purge restrictor
16. Regulated purge gas supply 17. WCX water cooler and connecons
18. Axial air cooler 19.
1. Vacuum system 2. High vacuum gauge
3. Vibraon damper 4. Inlet screen
5. nEXT pump 6. Backing valve
7. Vacuum gauge 8. Flexible bellows
9. Foreline trap
*
10. Backing pump
*§
11. Mist lter
*
/ silencer
§
12. Vent valve
13. Alternave posion for vent valve
14. Radial air cooler 15. PRX purge restrictor
16. Regulated purge gas supply 17. WCX water cooler and connecons
18. Axial air cooler 19.
*
for rotary pump
§
for scroll pump
Note:
An interstage port is available on the ‘i’ variant but is not shown in the gure.
Page 36
B8G000880_D - Installaon