Edwards nEXT nEXT85 - Introduction; Overview

2. Introducon
2.1 Overview
WARNING: SAFE EQUIPMENT USE
Risk of injury or damage to equipment. Improper use of the equipment could cause
damage to it or injury to people. The user is responsible for the safe operaon,
installaon and monitoring of the system.
WARNING: DANGEROUS FUMES
Risk of asphyxiaon. The drive contains electrolyc capacitors and, under certain
fault condions, may emit dangerous fumes. Ensure that the drive is operated in a
well-venlated area.
CAUTION: ELECTRICAL CONNECTIONS
Risk of damage to equipment. Do not aempt to separate the controller from the
pump since this will cause damage to the electrical connecons.
A nEXT pump has a turbomolecular pump with a permanently aached controller which
contains the drive electronics.
The controller controls the electrical supply to the pump. With the controller, you can
manually adjust the standby speed. Other controls can be operated through the logic
interface only. To operate the nEXT pump, connect it to the customer control equipment
and to the power supply or use manufacturer's TIC Turbo Instrument Controller, TIC
Turbo Controller or TAG Controller. Refer to Electrical data on page 22.
The controller drives the brush-less motor in the pump. Two variants of the pump are:
▪ The 'D' or 'Duplex' variant which has turbomolecular blades and a drag mechanism
that allows operaon at higher backing pressures than the pure turbomolecular
pumps.
▪ The ‘H’ or ‘High Compression’ variant which has the same technology as the 'D'
variant, but it is tuned to deliver higher compression.
Also available is an ‘iD’ or ‘iH’ interstage variant, which provides an interstage port
between the turbomolecular blades and drag mechanism.
The nEXT pump is supplied with an inlet screen. The inlet screen is installed in the
centering O‑ring for ISO and NW40 version pumps and in the envelope for CF version
pumps. The inlet screen prevents damage to the pump caused by debris entering the
pump.
The nEXT pump has a vent port for venng the pump and vacuum system to the
atmospheric pressure. The pump has a manual vent valve which can be replaced with a
TAV5 solenoid‑operated vent valve (available as an accessory, refer to Accessories on
page 101). The on‑board motor controller can control the TAV valve.
The nEXT pump has a purge port through which an inert purge gas can be introduced to
protect the bearing and motor from corrosion. You can install an oponal vent port
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B8G000880_D - Introducon