Edwards nEXT nEXT85 - Purge Gas Specification; Figure 6: Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with Pump Initially at Full Rotational Speed)

Vent gas specicaon and control Reference data
Maximum dew point at an atmospheric
pressure
-22 °C
Maximum size of parculates 1 µm
Maximum concentraon of oil 0.1 parts per million
Recommended me for the rotaonal
speed to reach 50%
> 15 seconds
Maximum permied rate of increase of
pressure
Refer to Figure: Maximum allowed rate
of increase in pressure during venng:
pressure against me (pump inially at
full speed) on page 21.
Maximum permied vent gas supply
pressure
1 bar (gauge), 14.5 psig, 2 x 10
5
Pa
Figure 6 Maximum allowed rate of pressure rise during venng: pressure against me (with
pump inially at full rotaonal speed)
3.4 Purge gas specicaon
Table 4
Purge gas specicaon
Purge gas specicaon Reference data
Purge gas Dry air, nitrogen, argon or other inert
gases
Maximum dew point at an atmospheric
pressure
-22 °C
Maximum size of parculates 1 µm
Maximum concentraon of oil 0.1 parts per million
Permied purge gas ow (when necessary)
20 to 50 sccm (0.33 to 0.84 mbar l s
-1
or
33 to 84 Pa l s
-1
)
Recommended purge gas ow
25 sccm (0.42 mbar l s
-1
, 42 Pa l s
-1
)
Page 21
B8G000880_D - Technical data