Edwards nEXT nEXT85 - Pump Performance Data

Note:
If an external electrical load is connected to the Normal output line, the normal LED can
come on.
3.12 Pump performance data
Table 10
Pump performance data
Parameter
nEXT85D nEXT85H nEXT85D nEXT85H nEXT85D nEXT85H nEXT85D nEXT85H
Mass 3.0 Kg 3.0 Kg 4.4 Kg 4.4 Kg 3.2 Kg 3.2 Kg 2.9 Kg 2.9 Kg
Main inlet
port
ISO63 ISO63 CF63 CF63 ISO100 ISO100 NW40 NW40
Exhaust
port
NW16
Vent port 1/8 inch BSP
Main inlet pumping speed:
N
2
(l s
-1
)
84 84 84 84 86 86 47 47
He (l s
-1
)
78 78 78 78 80 78 61 61
H
2
(l s
-1
)
60 54 60 54 60 54 49 49
Ar (l s
-1
)
80 80 80 80 84 84 44 44
Peak compression rao from the backing port to the main inlet port:
N
2
> 10
11
He
8 x 10
6
2 x 10
7
8 x 10
6
2 x 10
7
8 x 10
6
8 x 10
6
8 x 10
6
2 x 10
7
H
2
2 x 10
5
5 x 10
5
2 x 10
5
5 x 10
5
2 x 10
5
5 x 10
5
2 x 10
5
5 x 10
5
Ar
> 10
11
Ulmate
pressure
(mbar)
< 5 x 10
-9
< 5 x 10
-9
< 5 x 10
-10
< 5 x 10
-10
< 5 x 10
-9
< 5 x 10
-9
< 5 x 10
-9
< 5 x 10
-9
Note:
Pumping speeds quoted are without inlet screens. Inlet screens may reduce the pumping
speed by up to 20%. Pumping speeds are measured in accordance with ISO 5302:2003.
Page 30
B8G000880_D - Technical data