Edwards nEXT nEXT85 - Backing Port Connection; Figure 13 Allowable Pump Orientation

Figure 13 Allowable pump orientaon
4.2.3 Backing port connecon
The pump is applicable to use with our rotary vane, scroll or diaphragm backing pumps.
System performance can change with the type of pump used. Contact us to select an
applicable backing pump for the applicaon.
WARNING: PUMP OVER
‑PRESSURE
Risk of injury or damage to equipment. To prevent over-pressure in the pump, do not
limit the exhaust line when you vent from a posive pressure gas supply.
CAUTION: BEARING LIFE
Risk of damage to equipment. Do not use the pump with a backing pressure less than
5 x 10
-4
mbar (5 x 10
-2
Pa). Lower backing pressures increases the evaporaon rate of
the lubricaon oil and can decrease the life of the bearings.
WARNING: UNSAFE DUCTING
Risk of injury or damage to equipment. Make sure that the ducng of the backing line
is safe to prevent leakage of oil mist or hazardous substances.
Page 40
B8G000880_D - Installaon