Edwards nEXT nEXT85 - Operating and Storage Conditions; Vent Gas Specification and Vent Control Data; Figure 5 Typical Base View

Figure 5 Typical base view
1. Body purge port 1/8” BSP 2. Envelope vent port 1/8” BSP
3. Alternave backing port posion 4. 4 x holes (M5 x 12 deep) Base mounng
holes and fan mounngs
5. 79 PCD mounng port 6. Electric drive
7. 24 V supply cable 8. Backing port NW16 (Oponal NW25)
1. Body purge port 1/8” BSP 2. Envelope vent port 1/8” BSP
3. Alternave backing port posion 4. 4 x holes (M5 x 12 deep) Base mounng
holes and fan mounngs
5. 79 PCD mounng port 6. Electric drive
7. 24 V supply cable 8. Backing port NW16 (Oponal NW25)
3.2 Operang and storage condions
Table 2 Operang and storage condions
Range Data
Ambient operang temperature range 5 °C to 40 °C
Ambient operang humidity range 10% to 90% RH (non‑condensing)
Maximum operang altude 2000 m
Ambient storage temperature range -30 °C to 70 °C
3.3 Vent gas specicaon and vent control data
The pump can be vented to atmosphere, but the high relave humidity of the air can
increase the subsequent pump‑down me. To decrease the pump‑down mes, vent
with dry and clean gases. Refer to Vent opons, vent valve connecon and control on
page 68 for the vent opons and the vent valve connecon. Refer to Controlled venng
opons on page 60 for conguring the venng opons.
Table 3
Vent gas specicaon and vent control
Vent gas
specicaon and control
Reference data
Vent gas Dry air, nitrogen, argon or other inert
gases
Page 20
B8G000880_D - Technical data