Edwards nEXT nEXT85 - Figure 10 Next85 Pumping Speed Versus Inlet Pressure Performance Graph; Figure 11 Next85 Compression Ratio Versus Backing Pressure Graph

Figure 10 nEXT85 pumping speed versus inlet pressure performance graph
Figure 11 nEXT85 compression rao versus backing pressure graph
Table 11
Maximum transient backing pressure at zero inlet ow
Parameter
nEXT85D nEXT85H
N
2
19 mbar 21 mbar
He 19 mbar 21 mbar
H
2
30 mbar 30 mbar
Ar 22 mbar 21 mbar
Maximum transient backing pressure is the pressure which can be sustained for a short
me at 120 W.
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B8G000880_D - Technical data