Edwards nEXT nEXT85 - Page 37

Table 12 Maximum connuous backing pressure nEXT85D at zero inlet ow
Gas Type: N
2
Cooling method
Ambient Temperature
20 ᵒC 30 ᵒC 40 ᵒC
Backing Pressure (mbar)
Natural convecon 6 3.2 0.6
Force air cooling 18 14 11
Water cooling
*
13 11.5 10
*
Cooling water temperature of 15 ᵒC at a ow rate of 15 l hr
-1
Values for maximum connuous backing pressure are taken under no inlet gas ow
condions, at sea level, in negligible magnec eld, with 120 W power limit seng.
Refer to Cooling on page 55 for cooling condions. At pressures above these, the
rotaonal speed decreases below nominal.
Table 13
Maximum connuous inlet pressure/throughput nEXT85D - Nitrogen
Gas Type: N
2
Cooling
method
Ambient Temperature
20 ᵒC 30 ᵒC 40 ᵒC
Throughput
(sccm)
Inlet
Pressure
(mbar)
Throughput
(sccm)
Inlet
Pressure
(mbar)
Throughput
(sccm)
Inlet Pressure
(mbar)
Natural
convecon
15 3.6e-03 12 2.9e-03 7 1.6e-03
Force air
cooling
95/80
*
3.8e-02/
2.9e-02
*
72 2.5e-02 37 1.0e-02
Water
cooling
§
50 1.5e-02 45 1.3e-02 40 1.1e-02
*
Based on 80 W power limit seng
§
Cooling water temperature of 15 ᵒC at a ow rate of 15 l hr
-1
Values for maximum connuous inlet pressure / throughput are taken using a nXDS20i
backing pump, at sea level, in negligible magnec eld, with 120 W power limit seng.
Refer to Cooling on page 55 for cooling condions. At pressures above these, the
rotaonal speed decreases below nominal. Values are given without inlet screen.
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B8G000880_D - Technical data