Edwards nEXT nEXT85 - Page 38

Table 14 Maximum connuous inlet pressure/throughput nEXT85D - Helium
Gas Type: He
Cooling
method
Ambient Temperature
20 ᵒC 30 ᵒC 40 ᵒC
Throughput
(sccm)
Inlet
Pressure
(mbar)
Throughput
(sccm)
Inlet
Pressure
(mbar)
Throughput
(sccm)
Inlet Pressure
(mbar)
Natural
convecon
90 3.50E-02 60 2.00E-02 20 5.60E-03
Force air
cooling
510/240
*
5.3e-01/
1.5e-01
*
475/240
*
4.6e-01/
1.5e-01
*
235 1.50E-01
Water
cooling
§
270/240
*
1.9e-01/
1.5e-01
*
200 1.10E-01 130 6.00E-02
*
Based on 80 W power limit seng
§
Cooling water temperature of 15 ᵒC at a ow rate of 15 l hr
-1
Values for maximum connuous inlet pressure / throughput are taken using a nXDS20i
backing pump, at sea level, in negligible magnec eld, with 120 W power limit seng.
Refer to Cooling on page 55 for cooling condions. At pressures above these, the
rotaonal speed decreases below nominal. Values are given without inlet screen.
Table 15
Maximum connuous inlet pressure/throughput nEXT85D - Argon
Gas Type: Ar
Cooling
method
Ambient Temperature
20 ᵒC 30 ᵒC 40 ᵒC
Throughput
(sccm)
Inlet
Pressure
(mbar)
Throughput
(sccm)
Inlet
Pressure
(mbar)
Throughput
(sccm)
Inlet Pressure
(mbar)
Natural
convecon
6.5 1.6e-03 5 1.2e-03 3 7.2e-04
Force air
cooling
35 9.4e-03 25 6.4e-03 13 3.2e-03
Water
cooling
*
20 5.0e-03 18 4.5e-03 15 3.7e-03
*
Cooling water temperature of 15 ᵒC at a ow rate of 15 l hr
-1
Values for maximum connuous inlet pressure / throughput are taken using a nXDS20i
backing pump, at sea level, in negligible magnec eld, with 120 W power limit seng.
Refer to Cooling on page 55 for cooling condions. At pressures above these, the
rotaonal speed decreases below nominal. Values are given without inlet screen.
Table 16
General pump performance data
Parameter
Value
Recommended backing pump nXDS15i
Page 33
B8G000880_D - Technical data