3. Overview
A nEXT730D, nEXT930D or nEXT1230H pump c
onsists of a turbomolecular pump with a
permanently aached motor controller containing drive electronics.
The motor controller controls the electrical supply to the pump. It allows manual
adjustment of the standby speed and all other controls can only be operated through
the logic interface. To operate the pump, connect it to the customer control equipment
and power supply or, alternavely, use the Edwards TIC Turbo Instrument Controller, TIC
Turbo Controller or TAG Controller and the Edwards power supply.
The motor controller drives the brush-less motor in the pump.
The nEXT pumps are supplied with an inlet screen ed into the centering O-ring for ISO
version pumps and into the envelope for CF version pumps. The inlet screen protects the
pump against damage that would be caused by debris entering the pump.
The nEXT pumps have a vent port for venng the pump and vacuum system to
atmospheric pressure. The pump is supplied with a manual vent valve ed; this can be
replaced with a TAV5 or TAV6 solenoid-operated vent valve. The TAV valve can be
directly controlled by the on-board motor controller.
The nEXT pumps have a purge port: an inert purge gas can be introduced to protect the
bearing and motor from corrosion. An oponal vent port adapter and purge restrictor
can be ed to the purge port to control the ow rate of the purge gas and to lter the
gas supply. Addionally this may be used to opmise the performance of the pump, for
example with low molecular mass gases.
A forced air cooling kit and a water-cooling block are available as oponal accessories to
cool the nEXT pumps.
3.1 Ordering informaon
Table 1
Table Ordering informaon
Part No. Pump name
B8J200300 nEXT730D NW25 ISO-K 160
B8J200400 nEXT730D NW25 CF 160
B8K200D00 nEXT930D NW25 ISO-K 200
B8K200F00 nEXT930D NW25 CF 200
B8N4A0F00 nEXT1230H CF200 NW40
B8N4A0E00 nEXT1230H ISO-F200 NW40
B8N4A0D00 nEXT1230H ISO-K200 NW40
B8N4A0FU0 nEXT1230H CF200 NW40 INV
B8N4A0EU0 nEXT1230H ISO-F200 NW40 INV
B8N4A0DU0 nEXT1230H ISO-K200 NW40 INV
nEXT730D and 930D pumps can be mounted in any orientaon,
nEXT1230H pumps can be mounted
08/2021 - ©Edwards Limited
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B8J200880_D - Overview