B8J200880_E - Installation
WARNING:
Ensure safe ducting of the backing line if oil mist or hazardous substances are
present.
Figure 32 Mounting high vacuum CF flange connection with blind hole thread
1. Copper gasket 2. Stud bolt with washer and nut
3. Pump housing with CF flange
Minimum bolt strength, yield strength
Minimum screw-in depth for steel
Recommended bolts for steel flanges - DIN
835
L1
Bolt quality
stainless steel bolts
The fastening torque levels apply to lubricated threads.
5.2.4 Backing port connection
The pump is suitable for use with Edwards Rotary Vane, Scroll or diaphragm backing
pumps. System performance may depend upon which pump is used. Contact Edwards
when selecting an appropriate backing pump for the application.
CAUTION:
The pump must not be operated or vented from a positive pressure gas supply when
the backing line is restricted or blocked.