Edwards nEXT730 - Connect to the Vacuum System; Figure 22 Typical Pumping System with a Next Pump

B8J200880_E - Installation
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CAUTION: CUTTING AND CRUSHING
When reaching into open flanges there is a risk of cutting and crushing your fingers.
Do not operate the vacuum pump with open flanges. Do not reach into the pump.
When installing the vacuum pump, first mechanically connect the inlets and outlets
and then make the electrical connections.
Figure 22 Typical pumping system with a nEXT pump
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7 8
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1. Vacuum system 2. High vacuum gauge
3. Inlet screen 4. nEXT pump
5. Backing valve 6. Vacuum gauge
7. Flexible bellows
8. Foreline trap
*
9. Backing pump
*§
10. Mist filter
*
/ silencer
§
11. Vent valve 12. Alternative position for vent valve
13. Radial air cooler 14. PRX purge restrictor
15. Regulated purge gas supply 16. WCX water cooler and connections
*
for rotary pump
§
for scroll pump
5.2 Connect to the vacuum system
CAUTION: VACUUM
Pulling into the vacuum can cause injury to hands or fingers.
Do not operate the vacuum pump with open flanges.
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CS/5055/A