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STP-301/451 Series Instruction Manual

TABLE of CONTENTS

SAFETY PRECAUTION

INTRODUCTION

LIMITED WARRANTY

1 Precautions for Safe Operation of the STP Pump.........................1-1

1.1 Usable Gases..................................................................................................................1-1

1.2 Precautions on Maintenance and Inspection...................................................................1-1

1.3 Labels..............................................................................................................................1-2

2 Operation Principle of the STP Pump ...........................................2-1

3 Unpacking .....................................................................................3-1

3.1 Unpacking the STP Pump and the STP Control Unit ......................................................3-1

3.2 Accessories.....................................................................................................................3-1

4 Installation of the STP Pump.........................................................4-1

4.1 Name and Function of Each Part ....................................................................................4-1

4.2 Precautions Before Installation........................................................................................4-3

4.2.1 Operating Environment ..........................................................................................4-3

4.2.2 Installation Area .....................................................................................................4-4

4.2.3 Bench.....................................................................................................................4-4

4.3 How To Install the STP Pump .........................................................................................4-5

4.3.1 Cleaning the Seal...................................................................................................4-6

4.3.2 STP Pump Installation Positions ............................................................................4-7

4.3.3 How to Secure the STP Pump ...............................................................................4-8

4.3.4 Vacuum Piping.....................................................................................................4-12

4.3.5 Connecting the Ground Cable..............................................................................4-13

4.3.6 Connecting the Purge Port (For the Chemical Specific Pump, Type C) ...............4-14

5 Baking, Cooling the STP Pump and Gas Pumping .......................5-1

5.1 Baking the STP Pump .....................................................................................................5-1

5.1.1 Attaching a Baking Heater .....................................................................................5-1

5.2 Cooling the STP Pump....................................................................................................5-2

5.2.1 Water Cooling Method ...........................................................................................5-2

5.2.2 Air Cooling Method.................................................................................................5-3

5.3 Gas Pumping...................................................................................................................5-4

5.3.1 How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)] ................5-4

6 Installation of the STP Control Unit ...............................................6-1

6.1 Name and Function of Each Part ....................................................................................6-1

6.1.1 Front Panel.............................................................................................................6-1

6.1.2 Rear Panel .............................................................................................................6-3

6.1.3 Top Panel...............................................................................................................6-5

6.1.4 Side Panel (Left) ....................................................................................................6-6

6.2 Precautions before Installation ........................................................................................6-7

Edwards STP-451 Series User Manual

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