STP-301/451 Series Instruction Manual
11-12
Troubleshooting
11.3.5 Overhaul
The recommended maintenance intervals for different process applications are tabulated
below:
Process Period Remarks
Metal Etch 1 year Ensure that TMS (Temperature Management
System) is fitted and operational to prevent
accumulation of by-product deposition in the
pump.
Other Etch
Processes
2 years
Etching
*1
It is recommended to change the pump rotor after 5 years due to accumulated wear of
the protective plating material
Other semiconductor
process
2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Clean applications
(Only vacuum pumping)
5 years
Other use (2 years) Dependent on application, contact Edwards.
◇ The touch down bearing inside the STP pump will be worn out after a number of full
speed touch downs.
The costs of replacing parts that need to be replaced because of deterioration or abrasion will
be at your own charge.
When overhaul of the STP pump or the STP control unit is needed, contact Service office.
*1
“Etching” includes semiconductor etching and LCD etching.
To Next Page
Loading...
