Edwards STP-451 Series - Other Abnormalities; Table 11.4 Troubleshooting While the STP Pump Is Rotating

STP-301/451 Series Instruction Manual
11-8
Troubleshooting
11.2.5 Other Abnormalities
Table 11.4 Troubleshooting While the STP Pump is Rotating
Symptom Probable causes Countermeasures Refer to
The STP pump stops. Check the past errors
referring to Section
11.2.2, "Displaying Past
Abnormalities/Errors and
Accumulated Running
Time".
11.2.2
Insufficient ultimate
pressure
Failure of the backing
pump
Check the backing pump
for its capacity and start
state. (use a pump with
the recommended
capacity or more)
4.3.4
13.1
Leakage of the piping
system
Check the piping system
for leakage.
4.3.4
Residual molecules If the main composition is
H
2
or H
2
O, perform
baking; if it is other than
H
2
or H
2
O, clean the
inside of the vacuum
equipment.
5.1
(If gases remain inside
the STP pump, contact
Service office when it is
needed to be cleaned.)
11.3.5