STP Series Turbomolecular Pump
1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
WARNING chemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
CAUTION
Introduce a dry N
2
gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.
CAUTION
Cool the STP pump to prevent the STP pump from overheating when pumping gases.
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