Edwards STP-XA2703 Series - Cable connection

STP Series Turbomolecular Pump
MT-00E-001-M
Page 26
INSTALLATION OF THE STP PUMP
2
2.3.6 Connecting the purge port
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
2
gas or other gas
into the STP pump in order to protect the inside of the STP pump. Introduce a dry N
2
gas through the
electromagnetic vent. valve, needle valve or similar valve (must be prepared by the customer) from
the purge port.
For instructions on how to introduce the purge gas, see Section 4.3.2.
Note: When not introducing the purge gas, close the purge port with the blank flange. Refer to
"TECHNICAL DATA" in the STP Pump Instruction Manual (B) for the position of a purge port.
2.3.7 Connecting the water cooling pipe
Secure the connection pipe to prevent water leakage and use cooling water under the conditions
provided in the STP Pump Instruction Manual (B). Install a secondly containment for liquids or a
water leak detector in the place (ex. cooling water ports) where cooling water may leak. Figure 17
shows the position of the cooling water ports. The STP pump in Figure 17 is a typical pump model.
Refer to the STP Pump Instruction Manual (B) for the configuration of each STP pump.
1.
Baking heater
2.
Cooling water port
Figure 17 - Positions of the cooling water port and baking heater
1
2