Edwards STP-XA2703 Series - Installation of the Stp Pump; Precautions before Installation; Operating Environment

STP Series Turbomolecular Pump
MT-00E-001-M
Page 13
INSTALLATION OF THE STP PUMP
2
2 INSTALLATION OF THE STP PUMP
2.1 Precautions before installation
2.1.1 Operating environment
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
MSDS and a safety advice of gas supplier.
WARNING
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
by exhaust gas.
CAUTION
If the STP pump is to be used in an area with radiation, contact Edwards.
CAUTION
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards:
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.