Edwards STP-XA2703 Series - Maintenance; Recommended Overhaul Intervals; Standard Replacement Parts

STP Series Turbomolecular Pump
MT-00E-001-M
Page 49
MAINTENANCE AND INSPECTION
6
6.4 Maintenance
6.4.1 Recommended overhaul intervals
If the STP pump has been used for a long time, accumulation of deposits and deterioration/failure of
the parts may cause the pump to stop running or fail.
To efficiently and safely use the STP pump, periodically conduct an overhaul.
By referring to the overhaul intervals based on the pump conditions of use as shown in the table
below, develop an overhaul plan.
Pump use condition
Recommended overhaul
interval
Remarks
When deposits have
accumulated
1 year
Processes resulting in large amount
of deposits in the pump will require
more frequent overhaul.
When no deposits have
accumulated but corrosive
gas has been used
2 years
If parts are severely deteriorated due
to corrosive gas, the overhaul
interval needs to be individually set.
When no deposits have
accumulated, and no
corrosive gas has been used
5 years
6.4.2 Standard replacement parts
When overhauling pumps, upper and lower touch down bearing, O-rings will be replaced as standard
replacement parts.
Note: When STP pump and STP control unit detect warning, it is essential to have the touch down
bearings replaced regardless of the recommended overhaul intervals. Refer to the Instruction
Manual for each model for details of warning detection.