Edwards STP-XA2703 Series - Precautions for safe operation

STP Series Turbomolecular Pump
MT-00E-001-M
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CONTENTS (CONTINUED)
Section Title Page
3 INSTALLATION OF THE STP CONTROL UNIT 29
3.1 STP control unit 29
3.1.1 SCU-350 series 29
3.1.2 SCU-800/801 30
3.1.3 SCU-1600/1601 31
3.2 Cable connection 32
3.2.1 STP connection cable 32
3.2.2 Power cable 33
3.3 How to connect the cables 34
4 OPERATION 37
4.1 Before starting the STP pump 37
4.1.1 Tuning 37
4.1.2 Operation of vacuum system 38
4.2 Pump operation 38
4.2.1 LED indication during operation 38
4.2.2 Starting the STP pump after a safety function operates 39
4.3 Gas pumping, cooling and baking the STP pump 39
4.3.1 Gas pumping 39
4.3.2 How to introduce a purge gas 40
4.4 Cooling the STP pump 40
4.4.1 Water-cooling method 40
4.4.2 Air-cooling method 41
4.5 Baking the STP pump 41
4.6 How to use the TMS unit 42
4.6.1 Parameter set mode 42
4.6.2 Starting/stopping the TMS unit 42
4.6.3 Temperature control 42
5 SAFETY FUNCTIONS 43
5.1 Safety functions 43
5.1.1 Power failure 43
5.1.2 Operation after a power recovery 43
5.1.3 Abnormal state of magnetic bearing 44
5.1.4 Excessive vibration 44
5.1.5 Motor driver overload 44
5.1.6 Overheating inside the STP pump 44
5.1.7 Overheating inside the STP control unit 45
5.1.8 Overspeed 45
5.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 45
5.1.10 Failure of the air-cooling fan
(for SCU-800/801, SCU-1600/1601) 45