Edwards STP-XA2703 Series - Page 6

STP Series Turbomolecular Pump
MT-00E-001-M
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PAGE
iv
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 5
2 Hot surface warning label 5
3 Heavy product caution label 6
4 Connector caution label 6
5 Caution label 6
6 TMS heater caution label 7
7 Rotation instruction label 7
8 Cross sectional view of the STP pump 8
9 Configuration of the STP pump (typical pump model) 10
10 Example of lifting the STP pump 17
11 Example of lifting the STP pump (horizontal positioning) 18
12 Jack-up the STP pump 18
13 STP pump with eyebolts 19
14 Installation of the STP pump to the vacuum equipment 21
15 STP pump installation positions 23
16 Positions of the outlet port on the horizontally
or slanted installed STP pump 23
17 Positions of the cooling water port and baking heater 26
18 SCU-350 series 29
19 SCU-800 30
20 SCU-801 30
21 SCU-1600/1601 31
22 SCU-1601 31
23 SCU-350 series STP connection cable 32
24 SCU-800/801 STP connection cable 32
25 SCU-1600/1601 STP connection cable 32
26 SCU-350 series power cable 33
27 SCU-800/801 power cable 33
28 SCU-1600/1601 power cable 33