Chapter 3 Commands
■To Monitor Door Lock Status
Table 3.7 Door lock status monitor command
Monitor command
Address
Main
command
Optional
parameter
Description/Example command/Response format/Example
response
<
Description
>
This command requests the chamber to return the door lock status.
<
Example command
>
“1,DOOR?”
<
Response format
>
“door locked/unloked status”
1 to 16 DOOR?
−
<
Example response
>
“OPEN”
・
Door lock status is returned as follows.
OPEN: Door is unlocked.
CLOSE: Door is locked. Operation start enabled.
* This command does not monitor whether the door is physically
open or closed.
■To Monitor Time Signal Output
Table 3.8 Time signal output monitor command
Monitor command
Address
Main
command
Optional
parameter
Description/Example command/Response format/Example
response
<
Description
>
This command requests the chamber to return information on
currently output time signals.
<
Example command
>
“1,RELAY?”
<
Response format
>
“number of ON relays,ON relay No”
1 to 16 RELAY?
−
<
Example response
>
“1,1”
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