ESPEC EHS-211 - To Monitor Key Lock Status; To Monitor Power ON;OFF Status and Key Lock Status

Chapter 3 Commands
■To Monitor Power ON/OFF Status and Key Lock Status
Table 3.22 Power ON/OFF status and key lock status monitor command
Monitor command
Address
Main
command
Optional
parameter
Description/Example command/Response format/Example
response
＜
Description
＞
This command requests the chamber to return power ON/OFF
status and key lock status.
＜
Example command
＞
“1,KEYSW?”
＜
Response format
＞
“power and key lock status”
1 to 16 KEYSW?
−
＜
Example response
＞
“SET”
・
Power and key lock statuses are returned as follows.
Reply Status
OFF: When power is OFF
SET: When operation is enabled
LOCK When keys are locked
■To Monitor Key Lock Status
Table 3.23 Key lock status monitor command
Monitor command
Address
Main
command
Optional
parameter
Description/Example command/Response format/Example
response
＜
Description
＞
This command requests the chamber to return key lock status.
＜
Example command
＞
“1,KEYPROTECT?”
＜
Response format
＞
“key lock status”
1 to 16 KEY
PROTECT?
−
＜
Example response
＞
“OFF”
・
Key lock status is returned as follows.

ON: When keys are locked

OFF: When keys are not locked
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