ESPEC EHS-411M - Page 14

Chapter 1 Overview
■Standard Mode
The computer sends commands (setting command or monitor command) to the
chamber and the chamber returns a response (reception status or monitor
data) to the computer.
Chamber
Computer
Setting command
When a processable setting
command is received
"OK : setting command"
Monitor command
When a processable monitor
command is received
"response"
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