Chapter 1 Overview
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When Echo Back is OFF
When echo back is OFF, the chamber does not return a response to
computer commands until it receives the data transfer trigger. With this
communication function, "address,G" is used as the data transfer trigger
instead of the command data. In this case, data transfer is as follows.
Computer
Chamber
Setting command
When a processable setting
command is received,
the setting is changed on the
chamber side, but a
response is not returned.
Monitor command
When a processable monitor
command is received
"address,G"
When the trigger is detected,
response data is returned.
"response"
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