MAX300-RTG : Hardware Manual Hardware Maintenance
55
Vacuum Pumps
To maintain a high level of vacuum within the chamber, a rotary vane mechanical
pump and a turbomolecular pump are used. The turbo pump is connected directly
to the vacuum chamber, while a mechanical (roughing; fore) pump is connected to
the turbo pump. The standard system is provided with a turbo pump and a rotary
vane pump. Figure 29 shows the location of these components.
Note: Pump vendor and/or specifications are subject to change without notice.
Figure 29: Pump Configuration on VacTrac
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