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Returnthesiliconetubetotheoriginalpositionandclamp.Turnonthevacuumtesttocheckfor
leakage.
9.6 Leakageatthedoorordrippingunderneath
Faultydescription:Airleakageandwaterdrippingareobvious.
Solution:
Pleasecheckifthesealisinstalledcorrectly(thelongsidewiththeword"H"isexposedoutside).
Pleasecheckifthesealisdamaged.
Appendix1SafetyDeviceDescription
Preheating system over temperature protection switch: The preheating system has an over‐temperature
protectionswitchthatautomaticallydisconnectsthepreheatingsystempowersupplycircuitwhenthetemperature
exceeds the limitation of protection switch threshold temperature to realize the protection function of the
preheatingsystem.
Steam generator over temperature protection switch: The steam generator has three temperature
switches.The protection switch that automatically disconnects steam generator power supply circuit whenits
temperatureexceedsthresholdtemperature.
Pressurereliefvalve:Whenthepressureinsidethechamberis1.3timesgreaterthantheworkingpressure,
thepressurereliefvalvewillautomaticallyopeninordertokeepthepressureinsidethechamberwithinasafe
pressurerange.
Appendix2Schematicdiagramofpipingsystem