Inficon PSG550 - Gas Type Dependence

tina60e1-a (2011-04) 23
2.2 Gas Type Dependence
Indicated pressure (gauge calibrated for air)
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
10
–2
8
6
4
2
10
–3
10
–3
24
6
10
–2
24
6
10
–1
24
6
10
0
24
6
10
1
24
6
10
2
H
2
He Ne
Xe
Kr
Ar
CO
2
Freon 12
Air
O
2
CO
N
2
p (mbar)
p
eff
(mbar)
Water vapor
Calibration factors
valid for Pirani pressure range below 1 mbar
p
eff
= C × indicated pressure
Gas type Calibration
factor C
Gas type Calibration
factor C
He
Ne
Ar
Kr
Xe
0.8
1.4
1.7
2.4
3.0
H
2
air, O
2
, CO, N
2
CO
2
water vapor
Freon 12
0.5
1.0
0.9
0.5
0.7