Inficon PSG550 - Output Signal Vs. Pressure

18
tina60e1-a (2011-04)
2.1 Output Signal vs. Pressure
Measurement range 0.61 … 10 V
Output signal U [V]
Pressure p
O
mbar
Pa
Torr
Error
0.0
0.61
3.02.52.01.51.00.5 4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E+06
1E–05
p = 10
0.778(U-c)
⇔
U = c +1.286log
10
p
valid in the range 5×10
-5
mbar <p< 1000 mbar
U p c U p c
[V] [mbar] 6.143 [V] [micron] 2.448
[V] [µbar] 2.287 [V] [Pa] 3.572
[V] [Torr] 6.304 [V] [kPa] 7.429
[V] [mTorr] 2.448
where p pressure
U output signal
c constant (pressure unit dependent)