Inficon PSG550 - Page 19

tina60e1-a (2011-04) 19
Measurement range 1.2 … 8.5 V
Output signal U [V]
Pressure p
1E+05
1E+04
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0
1.2
mbar
Pa
Torr
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
Error
p = 10
(U-c)
⇔
U = c + log
10
p
valid in the range 5×10
-5
mbar <p< 1000 mbar
U p c U p c
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
where p pressure
U output signal
c constant (pressure unit dependent)