Inficon PSG550 - Page 20

20
tina60e1-a (2011-04)
Measurement range 0.375 … 5.529 V
Signal U Pressure p
[V] [mbar] [Pa] [Torr]
0.375 <5×10
-5
<6.65×10
-3
<5×10
-5
0.376 0.000133322 0.013332237 0.0001
0.377 0.000266645 0.026664474 0.0002
0.379 0.000666612 0.066661184 0.0005
0.384 0.001333224 0.133322368 0.0010
0.392 0.002666447 0.266644736 0.0020
0.417 0.006666118 0.66661184 0.0050
0.455 0.013332237 1.33322368 0.0100
0.523 0.026664474 2.66644736 0.0200
0.682 0.066661184 6.6661184 0.0500
0.876 0.133322368 13.3322368 0.1000
1.155 0.266644736 26.6644736 0.2000
1.683 0.66661184 66.661184 0.5000
2.217 1.33322368 133.322368 1.0000
2.842 2.66644736 266.644736 2.0000
3.675 6.6661184 666.61184 5.0000
4.206 13.3322368 1333.22368 10.0000
4.577 26.6644736 2666.44736 20.0000
4.846 66.661184 6666.1184 50.0000
4.945 133.322368 13332.2368 100.0000
5.019 266.644736 26664.4736 200.0000
5.111 399.967104 39996.7104 300.0000
5.224 533.289472 53328.9472 400.0000
5.329 666.61184 66661.184 500.0000
5.419 799.934208 79993.4208 600.0000
5.495 933.256576 93325.6576 700.0000
5.529 1000 100000 750.0637