Content
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GA10218_002_C0 - 10/2016 - © Leybold GmbH
3.12 Access Control .......................................................................... 83
3.12.1 Zero ........................................................................................... 83
3.12.2 Access to CAL Function ............................................................ 84
3.12.3 Change Menu-PIN ..................................................................... 84
3.13 Calibration ................................................................................. 84
3.13.1 Introduction ............................................................................... 84
3.13.2 The calibration Routines ............................................................. 85
3.13.3 Internal Calibration ..................................................................... 85
3.13.4 External Calibration .................................................................... 86
3.14 Switching Off/Shutting Down ..................................................... 88
4 Maintenance 89
4.1 Safety Information ...................................................................... 89
4.2 Maintenance Intervals ................................................................ 89
4.3 Service at Leybold ..................................................................... 89
4.4 Maintenance Work ..................................................................... 90
4.4.1 Opening of the PHOENIX L300i ................................................. 90
4.4.2 Exchanging the Filter Mats ......................................................... 91
4.4.3 Exchanging the Oil ..................................................................... 92
4.4.4 Cleaning .................................................................................... 92
4.4.5 Exchanging the Fuses ................................................................ 92
4.4.6 Exhaust Oil Filter ........................................................................ 94
4.4.7 Turbo Molecular Pump ............................................................... 94
4.5 Calibrated Leak TL7 ................................................................... 95
4.5.1 Technical Data ........................................................................... 95
4.5.2 Factory Inspection ..................................................................... 95
5 Troubleshooting 96
5.1 Hints for Troubleshooting ........................................................... 96
5.2 List of Errors & Warnings ............................................................ 96
6 Waste Disposal 103
7 Certificates 105