MKS 253B-2-2-2 - Page 7

List of Fi
g
ures and Tables
v
List of Figures and Tables
Figures
Figure 1: Type 253 Valve with an ASA Flange ..................................................................... 23
Figure 2: Type 253 Valve with a KF Style ISO Flange.......................................................... 24
Figure 3: Type 253 Valve with a NW Style ISO Flange......................................................... 24
Figure 4: Type 253 Valve with a CF Flange .......................................................................... 25
Figure 5: Type 253 Valve with a JIS Flange.......................................................................... 25
Figure 6: Pump Label............................................................................................................ 28
Figure 7: Serial Number Label .............................................................................................. 28
Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole.........................................................6
Tableau 3: Définition des symboles apparaissant sur l'unité......................................................10
Tabla 4: Definición de los símbolos hallados en la unidad........................................................14
Table 5: System Interface Cables..............................................................................................20
Table 6: 15-Pin Type “D” Connector Pinout.............................................................................27