MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
As part of our continuous product improvement policy, we are always pleased to receive your comments
and suggestions about how we should develop our product range. We believe that the manual is an
important part of the product and would welcome your feedback, particularly relating to any omissions or
inaccuracies you may discover.
You can send your comments to:-
MKS Instruments UK Ltd - Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
U.K.
+44 (0)1270 250150 Tel. International
+44 (0)1270 251939 Fax. International
Email: manual_info@mksinst.com
MKS Products provided subject to the US Export Regulations.
Diversion or transfer contrary to U.S. law is prohibited.
HPQ3 is a registered trademark of MKS Instruments UK Limited.
Conflat® is a registered trademark of Varian Associates.
Viton® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.
Windows® is a trademark of the Microsoft Corporation.
All other brand or product names are trademarks or registered trademarks of their respective companies and as such are fully
recognised.
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