MKS HPQ3 User Manual

MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
3
Table of Contents
Overview 7
1. Specifications 9
1.1 Mechanical 9
HPQ3 9
24VDC Power Supply 9
Analyser 9
1.2 Electrical 10
Power Supply 11
1.3 Environmental 11
Temperature range 11
1.4 Safety 11
1.5 Connectors 11
1.6 Warning labels 12
1.7 Ventilation 12
2. Rear Panel Connections 17
2.1 X-Trip 18
2.2 Audio Socket 18
2.3 Emission Indicator 19
2.4 Multiplier Indicator – N/A 19
2.5 Power Indicator 19
2.6 Gauge Connector 20
2.7 Power 20
2.8 Analogue I/O Connector 21
2.9 Digital I/O Connector 22
2.10 Ethernet 24
3. Analyser Installation 25
3.1 Unpacking 25
3.2 Inspecting the analyser 25
3.3 Installing the analyser 27
3.4 Checking the system pressure 27
3.5 Mounting the analyser 29
4. HPQ3 Installation 30
4.1 Installation 30
4.2 Electrical connections 30
5. Connecting to the Ethernet Port 32
5.1 Adding the HPQ3 33
5.2 Directly connecting to the HPQ3 35
5.3 Assigning a static IP Address 39
6. Baking 42
7. Analyser Maintenance 43
7.1 Overview 43
7.2 Ohmmeter analyser checks 44
7.3 Checking filaments 45
7.4.1 Removing the filaments 47
7.4.2 Fitting filaments 51
51
7.5 Ion Source cleaning 52
7.5.1 Cleaning while fitted to the analyser
52
7.5.2 Removing the ion-source to clean or
replace 53

MKS HPQ3 Specifications

General

Brand	MKS
Model	HPQ3
Category	Measuring Instruments
Language	English