MKS HPQ3 User Manual

MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
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MKS Instruments UK Ltd
3 – 4 Cowley Way
Crewe
Cheshire
CW16AG
United Kingdom
EC Declaration of Conformity
MKS Instruments UK Ltd declares that the:
HPQ3 RGA (MKS114) control electronics package
Is in accordance with the following directives:
I hereby declare that the equipment named above has been designed to comply with the relevant
sections of the above referenced specifications. The unit complies with all essential requirements
of the Directives.
2004/108/EEC Electromagnetic Compatibility Directive
EN 61326-1:2006 Electrical equipment for measurement, control & laboratory use.
2006/95/EC Low Voltage Directive
EN 61010-1:2006 Safety requirements for electrical equipment for measurement, control &
laboratory use.

MKS HPQ3 Specifications

General

Brand	MKS
Model	HPQ3
Category	Measuring Instruments
Language	English