MKS HPQ3 User Manual

MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
9
1. Specifications
1.1 Mechanical
HPQ3
Dimensions:
127mm wide x 127mm x 179mm deep, plus 46mm over analyser connector to face of CF flange.
Weight:
1.7 kg
24VDC Power Supply
Dimensions:
75mm wide x 45mm high x 146mm deep plus 30mm over strain relief.
Weight:
0.6 kg
Analyser
Max. Operating pressure
HPQ3 1e-3 Torr (1.3e-3 mbar)
HPQ3S 8e-3 Torr (1e-2 mbar) – Application
dependant
Maximum transient burst pressure
4e-2 Torr (5e-2 mbar) – gas dependant

MKS HPQ3 Specifications

General

Brand	MKS
Model	HPQ3
Category	Measuring Instruments
Language	English