MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
It is worthwhile at this stage to see if the source requires any attention, especially if the filament(s)
have broken because of an over pressure situation in your vacuum system.
With the filaments removed, you have a clear view of the source cage. The signs to look for are
powdery deposits, which will vary in colour but may be brown, blue, canary yellow or white
depending upon the precise circumstances which led to their formation.
If these oxides are present, it is recommended that you refer to the section on ion source cleaning
on page 36 before proceeding.
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