MKS T3B Series User Manual

15
Table 6: RS-232 Setup Messages (continued)
Description Command Request Response
Set Model Based
Parameters
ST letter-val
u
e:
A = STA

D = STD 
E = STE 
F = STF 
R60
R63
R64
R65
STA value
STD
value
STE value
STF value
Sensor Signal Input
Range
G value
value:
0 = 1 V
1 = 5 V
2 = 10 V*
R35
G
value
value: 0 = 1 V
1 = 5 V
2 = 10 V
Analog Setpoint Range
A value
value: 0 = 5 VDC
1 = 10 VDC*
R24
A
value
value: 0 = 5VDC
1 = 10VDC
Sensor Range LOW
EL value
value: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10
*
21 = 20
07 = 50
08 = 100
22 = 200
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 = 1.33 mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332
20 = 0.1333
23 = 0.001
R55
EL value
value: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10
21 = 20
07 = 50
08 = 10
0
22 = 20
0
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 = 1.33 mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332
20 = 0.1333
23 = 0.001
* Initial setting
(continued on the next page)

MKS T3B Series Specifications

General

Brand	MKS
Model	T3B Series
Category	Control Unit
Language	English