3 D6T MEMS Thermal Sensors User’s Manual (A284)
5 Product Features
MEMS Thermal Sensors measure the surface temperature of objects. The D6T-44L-06 model
features 16 channels in a 4 x 4 arrangement. The D6T-8L-09 features a single 8-channel array.
The D6T-1A-01/-02 models feature a 1-channel sensor chip. The module has been optimized by
placing the specialized downstream processing circuit adjacent to the sensor chip to achieve
low-noise temperature measurements.
Using our MEMS Thermal Sensors as a human sensor eliminates the problems in using
conventional pyroelectric sensors to detect the presence of people. Pyroelectric sensors can be
used to detect movement of people based on the principle of detecting change components of
infrared rays, but the measurement signal is lost during times of no movement. Conversely,
Thermal Sensors continue to generate a measurement signal during times of no movement.
Fig. 3. Difference Between MEMS Thermal Sensor and Pyroelectric Sensor
MEMS Thermal Sensors feature a silicon lens optically designed to have specific sensitivity
characteristics. Our Thermal Sensors feature the same field of view (FOV) at a maximum
sensitivity of 50% as general sensors.
Fig. 4. Field of View (FOV) and Sensitivity Characteristics Illustrations
FOV
(a) Output of pyroelectric sensor (b) Output of Thermal Sensor
(a) Conceptual illustration of D6T-44L-06
Maximum sensitivity of
(b)
Conceptual illustration of single-element
FOV and XY-axis sensitivity characteristics
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