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Omron D6F Series User Manual

Omron D6F Series
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MEMS Flow Sensor
MEMS Flow Sensor
User’s Manual
A286-E1-01
D6F-series
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Omron D6F Series Specifications

General IconGeneral
BrandOmron
ModelD6F Series
CategoryAccessories
LanguageEnglish

Summary

Outline

What is a Flow Sensor?

Structure

Basic composition of flow sensors

Describes the fundamental components of Omron flow sensors, including the MEMS chip, amplifier circuit, and optimized flow path.

Flow Sensor Product Lineup

Details the three main categories of Omron flow sensors: Mass flow, Flow velocity, and Differential pressure sensors.

Operating principle

Basic structure of MEMS flow sensor chip

Explains the physical structure of the MEMS sensor chip, including the heater, thermopiles, and cavity.

Detecting principle of mass flow sensor

Details how the sensor detects mass flow using heat distribution changes caused by gas flow and thermopile output differences.

Product Features

Detection range of flow sensors

Defines the flow rate range a sensor can detect, with output voltage specified at lower and upper limits.

Output signal (operating characteristics)

Describes the sensor's non-linear analog DC voltage output signal as a function of flow rate.

Permission pressure performance

Specifies the maximum pressure the sensor can withstand without airproof degradation or affecting performance.

Repeatability

Indicates the sensor's ability to produce consistent outputs for the same flow rate, influenced by its unique flow path design.

Usage of Flow Sensor

Electrical Connection

Guides on connecting the flow sensor's Vout and GND terminals, emphasizing load resistance requirements for accurate voltage detection.

Screw type

Provides instructions for installing screw-type port sensors, including torque limits and sealant application.

Quick fastener type

Details the installation of quick fastener types (P10 and P14) for easy pipe connection without tools.

Manifold mount type

Explains the installation of manifold mount sensors, suitable for space-constrained applications, with O-ring recommendations.

Bamboo type

Describes the installation of bamboo type sensors for urethane tubes, emphasizing ease of use and airproof design.

Cleanup of the inflow gas

Stresses the importance of clean, dry gas and suggests using filters to prevent sensor failure and characteristic changes.

Stabilization

Discusses measures to mitigate pulsation effects on measurement accuracy, such as buffer tanks or orifices.

Measurement of high flow

Introduces a method to measure high flow rates using a bypass path and measuring differential pressure.

Consideration of the laminar flow

Advises on pipe length requirements and mounting techniques to achieve stable laminar airflow for accurate measurement.

Temperature characteristics

Explains how ambient temperature affects output characteristics and how variations are expressed as %FS.

The influence of dust

Highlights that dust accumulation degrades performance and recommends using a filter.

The influence of pressure and temperature

Details how pressure and temperature affect mass flow rate measurement based on gas laws.

The influence of the mounting direction

Notes that mounting direction can slightly alter output due to heat distribution, recommending horizontal installation.

Output changes in various gases

Explains that output characteristics vary with gas properties like specific heat and thermal conductivity.

The behavior in over flow rate range

Describes sensor output behavior when flow rate exceeds or falls below the specified range, noting it's not covered under warranty.

The influence of humidity

Warns that humidity can affect measurement accuracy and recommends using dry gas.

Application example

Lists various applications and usage scenarios for the MEMS flow sensors across different industries.

Glossary

MEMS

Defines MEMS as Micro Electro Mechanical Systems, referring to integrated micro-component devices.

%F.S. and %RD

Explains accuracy metrics: %FS for full scale and %RD for reading value, detailing how errors are calculated.

Volumetric flow rate and Mass flow rate

Differentiates volumetric flow rate (dependent on P, T) from mass flow rate (independent of P, T).

Normal Volumetric Flow Rate and Standard Volumetric Flow Rate

Defines NLM/SLM based on standard pressure (1atm) and temperature (0°C) for mass flow rate definition.

Warranty and Limited Liability

DEFINITIONS

Provides definitions for terms like Omron Products, Catalogues, Conditions, and User Application.

NOTE ABOUT DESCRIPTIONS

Clarifies that ratings are tested separately, reference data is for guidance, and examples are not warranted.

NOTE ABOUT USE

Advises users to conform to conditions, confirm fitness for application, and take safety measures for specific high-risk applications.

WARRANTY

Outlines the one-year warranty period, what it covers, and exceptions like misuse or force majeure.

LIMITATION ON LIABILITY

States that the provided warranty is the sole liability and disclaims other expressed or implied warranties.

PROGRAMMABLE PRODUCTS

Denies Omron's responsibility for user programming of programmable products and its consequences.

EXPORT CONTROLS

Requires buyers to comply with Japanese and international laws regarding the export of Omron Products.

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