15 D6F-series MEMS Flaw Sensor User’s Manual (A286)
6.4.1 Temperature characteristics
Basic characteristics of OMRON’s flow sensors specify the output characteristics and the
accuracy at the conditions of 25±5℃ but the flow sensor has temperature characteristics. If
the ambient temperature is changed, the output characteristics of the flow sensor will vary.
Variation due to temperature change is expressed in %FS as the maximum amount of
variation within the operating temperature range defined in specifications, which is
represented based on the output at 25 ℃.
This variation counts towards the precision to be
defined as the basic specifications. For example, when using in -10 ~ 60℃ ambient
temperature, the variation of D6F-01A1-110 will be ± 3%F. S. of 25℃ characteristics, which
means that there is a case where the variation of ± 0.12V occurs as a flow sensor voltage
output. As a general example, Fig.18 shows the output variation of D6F-01A1-110 from the
characteristics at 25℃.
Flow rate [L/min]
Output variation [%FS]
Temperature Characteristics of D6F-01A1
Output variation from the output at 25degC
Flow rate [L/min]
Output variation [%FS]
Temperature Characteristics of D6F-01A1
Output variation from the output at 25degC
Fig 18． Temperature characteristic of D6F-01A1-110
6.4.2 The influence of dust
If dust is deposited on the flow channel and the sensor chip, it changes the flow sensor's
output characteristics.
Therefore, it is recommended a filter be used with the sensor
depending on the gas that is used.
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